R. S. Hemsworth, New J. Phys, vol.19, p.25005, 2017.

K. Tsumori, Rev. Sci. Instrum, vol.87, pp.2-936, 2016.

W. Alexander, Accelerators for High Intensity Beams, vol.6, 2014.

H. Etoh, DEVELOPMENT OF A HIGH CURRENT NEGATIVE ION SOURCE FOR MEDICAL CYCLOTRONS, Proceedings of the 13th Annual Meeting of Particle Accelerator Society of Japan, pp.2016-052, 2016.

H. J. Woo, APPLICATION OF HYDROGEN ION BEAMS FOR SOI WAFER FORMATION, Proceedings of APAC 2004, pp.435-437, 2004.

S. Ahmed, Proton implantation for effective electrical isolation of InP, InGaAs and GaAs: Role of variable doses and implant temperature, Proceedings of 14th

, Indium Phosphide and Related Materials Conference, 2002.

M. Bacal and G. W. Hamilton, Phys. Rev. Lett, vol.42, p.1538, 1979.

M. Nishiura, M. Sasao, and M. Wada, Measurements of H-density and work function of a plasma electrode in a negative ion source, Proceedings of 9th Int. Symp. on Production and Neutralization of Negative Ions and Beams, AIP Conf. Proc, vol.639, p.21, 2002.

A. A. Padama, Journal of the Vacuum Society of Japan, vol.57, issue.1, 2014.

G. Cartry, A, New Journal of Physics, vol.19, p.25010, 2017.

A. Ahmad, C. Pardanaud, M. Carrèr, J. Layet, A. Gicquel et al.,

R. Jaoul, G. Engeln, and . Cartry, Journal of Physics D: Applied Physics, vol.47, p.85201, 2014.

H. Hosono, Japanese Journal of Applied Physics, vol.52, p.90001, 2013.

V. Peter and . Susko, Phys. Rev. Lett, vol.91, p.126401, 2003.

S. Matsuishi, Science, vol.301, issue.5633, pp.626-635, 2003.

M. Miyakawa, K. Hayashi, M. Hirano, Y. Toda, T. Kamiya et al., Adv. Mater, vol.15, p.1100, 2003.

Y. Toda, H. Yanagi, E. Ikenaga, J. J. Kim, M. Kobata et al., Advanced Materials, vol.19, p.3564, 2007.

D. Kogut, K. Achkasov, J. P. Dubois, R. Moussaoui, J. B. Faure et al., Plasma Sources Science and Technology, vol.26, p.45006, 2017.

M. Wada, Proc. 3rd Int. Symp. Production and Neutralization of Negative Ions and Beams, p.247, 1983.

Y. Toda, ACS Nano, vol.5, 1907.

M. Sasao, K. Tanemura, M. Wada, and K. Tsumori, Negative ion formation from a low-work-function nanoporous inorganic electride surface, AIP Conference Proceedings, vol.1869, p.20005, 2017.