PdGe contact fabrication on Ga-doped Ge: Influence of implantation-mediated defects

T. Luo (1) , J. Perrin Toinin , M. Descoins (1) , K. Hoummada (1) , M. Bertoglio (1) , L. Chow , D. Narducci , A. Portavoce (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains: Physics [physics]; Condensed Matter [cond-mat]; Materials Science [cond-mat.mtrl-sci]

T. Luo, J. Perrin Toinin, M. Descoins, K. Hoummada, M. Bertoglio, et al.. PdGe contact fabrication on Ga-doped Ge: Influence of implantation-mediated defects. Scripta Materialia, 2018, 150, pp.66-69. ⟨10.1016/j.scriptamat.2018.02.037⟩. ⟨hal-02381663⟩