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PdGe contact fabrication on Ga-doped Ge: Influence of implantation-mediated defects

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https://hal-amu.archives-ouvertes.fr/hal-02381663
Contributor : Alain Portavoce <>
Submitted on : Tuesday, November 26, 2019 - 5:08:36 PM
Last modification on : Wednesday, November 27, 2019 - 1:40:56 AM

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T. Luo, J. Perrin Toinin, M. Descoins, K. Hoummada, M. Bertoglio, et al.. PdGe contact fabrication on Ga-doped Ge: Influence of implantation-mediated defects. Scripta Materialia, Elsevier, 2018, 150, pp.66-69. ⟨10.1016/j.scriptamat.2018.02.037⟩. ⟨hal-02381663⟩

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