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Atom probe tomography for advanced metallization

D. Mangelinck 1 F. Panciera 2 K. Hoummada 1 M. El Kousseifi C. Perrin M. Descoins 1 A. Portavoce 1
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ST-CROLLES - STMicroelectronics [Crolles]
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https://hal-amu.archives-ouvertes.fr/hal-02385332
Contributor : Alain Portavoce <>
Submitted on : Thursday, November 28, 2019 - 5:20:20 PM
Last modification on : Monday, March 29, 2021 - 3:08:09 PM

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UNIV-AMU | IM2NP | UNIV-TLN | CNRS

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D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, Elsevier, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩

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