Atom probe tomography for advanced metallization - Archive ouverte HAL Access content directly
Journal Articles Microelectronic Engineering Year : 2014
Not file

Dates and versions

hal-02385332 , version 1 (28-11-2019)

Identifiers

Cite

D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩
53 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More