Atom probe tomography for advanced metallization

D. Mangelinck; F. Panciera; K. Hoummada; M. El Kousseifi; C. Perrin; M. Descoins; A. Portavoce

doi:10.1016/j.mee.2013.12.018

Journal Articles Microelectronic Engineering Year : 2014

Atom probe tomography for advanced metallization

(1) , (2) , (1) , , , (1) , (1)

1
2

D. Mangelinck

Function : Author
PersonId : 17430
IdHAL : dominique-mangelinck
ORCID : 0000-0002-3429-1948
IdRef : 086297600

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

F. Panciera

Function : Author
PersonId : 741369
IdHAL : federico-panciera
ORCID : 0000-0003-2455-6516

STMicroelectronics [Crolles]

K. Hoummada

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

M. El Kousseifi

Function : Author

C. Perrin

Function : Author

M. Descoins

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

A. Portavoce

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains

Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci]

Alain Portavoce : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-02385332

Submitted on : Thursday, November 28, 2019-5:20:20 PM

Last modification on : Wednesday, February 8, 2023-5:11:10 PM

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hal-02385332 , version 1 (28-11-2019)

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HAL Id : hal-02385332 , version 1
DOI : 10.1016/j.mee.2013.12.018

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D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩

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Atom probe tomography for advanced metallization

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