Journal Articles
Microelectronic Engineering
Year : 2014
Alain Portavoce : Connect in order to contact the contributor
https://hal-amu.archives-ouvertes.fr/hal-02385332
Submitted on : Thursday, November 28, 2019-5:20:20 PM
Last modification on : Wednesday, February 8, 2023-5:11:10 PM
Cite
D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩
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