Service interruption on Monday 11 July from 12:30 to 13:00: all the sites of the CCSD (HAL, EpiSciences, SciencesConf, AureHAL) will be inaccessible (network hardware connection).
Skip to Main content Skip to Navigation
Journal articles

Atom probe tomography for advanced metallization

Complete list of metadata

https://hal-amu.archives-ouvertes.fr/hal-02385332
Contributor : Alain Portavoce Connect in order to contact the contributor
Submitted on : Thursday, November 28, 2019 - 5:20:20 PM
Last modification on : Sunday, June 26, 2022 - 12:25:34 AM

Identifiers

Collections

Citation

D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, Elsevier, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩

Share

Metrics

Record views

49