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Atom probe tomography for advanced metallization

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https://hal-amu.archives-ouvertes.fr/hal-02385332
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Submitted on : Thursday, November 28, 2019 - 5:20:20 PM
Last modification on : Tuesday, December 10, 2019 - 5:44:02 PM

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D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, Elsevier, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩

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