Atom probe tomography for advanced metallization

D. Mangelinck (1) , F. Panciera (2) , K. Hoummada (1) , M. El Kousseifi , C. Perrin , M. Descoins (1) , A. Portavoce (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Science des matériaux [cond-mat.mtrl-sci]

D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩