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Tungsten diffusion in silicon

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https://hal-amu.archives-ouvertes.fr/hal-02385347
Contributor : Alain Portavoce <>
Submitted on : Thursday, November 28, 2019 - 5:25:30 PM
Last modification on : Monday, March 29, 2021 - 3:08:09 PM

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A. de Luca, A. Portavoce, M. Texier, C. Grosjean, N. Burle, et al.. Tungsten diffusion in silicon. Journal of Applied Physics, American Institute of Physics, 2014, 115 (1), pp.013501. ⟨10.1063/1.4859455⟩. ⟨hal-02385347⟩

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