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Investigation of a new method for dopant characterization

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https://hal-amu.archives-ouvertes.fr/hal-02386183
Contributor : Alain Portavoce <>
Submitted on : Friday, November 29, 2019 - 11:13:42 AM
Last modification on : Saturday, November 30, 2019 - 1:44:17 AM

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J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, Elsevier, 2007, 47 (9-11), pp.1599-1603. ⟨10.1016/j.microrel.2007.07.091⟩. ⟨hal-02386183⟩

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