https://hal-amu.archives-ouvertes.fr/hal-02386183 Contributor : Alain PortavoceConnect in order to contact the contributor Submitted on : Friday, November 29, 2019 - 11:13:42 AM Last modification on : Thursday, March 24, 2022 - 3:10:59 AM
J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, Elsevier, 2007, 47 (9-11), pp.1599-1603. ⟨10.1016/j.microrel.2007.07.091⟩. ⟨hal-02386183⟩