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Journal Articles Microelectronics Reliability Year : 2007

Investigation of a new method for dopant characterization

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Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci]

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https://hal-amu.archives-ouvertes.fr/hal-02386183

Submitted on : Friday, November 29, 2019-11:13:42 AM

Last modification on : Monday, December 12, 2022-11:50:05 AM

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hal-02386183 , version 1 (29-11-2019)

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J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, 2007, 47 (9-11), pp.1599-1603. ⟨10.1016/j.microrel.2007.07.091⟩. ⟨hal-02386183⟩

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