Investigation of a new method for dopant characterization - Archive ouverte HAL Access content directly
Journal Articles Microelectronics Reliability Year : 2007

Investigation of a new method for dopant characterization

(1) , (2, 1, 3) , (4) , (1) , (1) , (3) , (3)
1
2
3
4

Dates and versions

hal-02386183 , version 1 (29-11-2019)

Identifiers

Cite

J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, 2007, 47 (9-11), pp.1599-1603. ⟨10.1016/j.microrel.2007.07.091⟩. ⟨hal-02386183⟩
155 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More