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Effect of Sb on Si/Si and Ge/Si growth process

A. Portavoce 1 I. Berbezier 1 A. Ronda 2 
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 CRMCN - Centre de recherche de la matière condensée et des nanosciences
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https://hal-amu.archives-ouvertes.fr/hal-02393433
Contributor : Alain Portavoce Connect in order to contact the contributor
Submitted on : Wednesday, December 4, 2019 - 1:41:41 PM
Last modification on : Wednesday, November 3, 2021 - 3:20:09 PM

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A. Portavoce, I. Berbezier, A. Ronda. Effect of Sb on Si/Si and Ge/Si growth process. Materials Science and Engineering: B, Elsevier, 2003, 101 (1-3), pp.181-185. ⟨10.1016/S0921-5107(02)00710-9⟩. ⟨hal-02393433⟩

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