Effect of Sb on Si/Si and Ge/Si growth process

A. Portavoce; I. Berbezier; A. Ronda

doi:10.1016/S0921-5107(02)00710-9

Journal Articles Materials Science and Engineering: B Year : 2003

Effect of Sb on Si/Si and Ge/Si growth process

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A. Portavoce

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

I. Berbezier

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

A. Ronda

Function : Author

Centre de recherche de la matière condensée et des nanosciences

Domains

Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci]

Alain Portavoce : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-02393433

Submitted on : Wednesday, December 4, 2019-1:41:41 PM

Last modification on : Friday, March 24, 2023-2:53:14 PM

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hal-02393433 , version 1 (04-12-2019)

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HAL Id : hal-02393433 , version 1
DOI : 10.1016/S0921-5107(02)00710-9

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A. Portavoce, I. Berbezier, A. Ronda. Effect of Sb on Si/Si and Ge/Si growth process. Materials Science and Engineering: B, 2003, 101 (1-3), pp.181-185. ⟨10.1016/S0921-5107(02)00710-9⟩. ⟨hal-02393433⟩

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Effect of Sb on Si/Si and Ge/Si growth process

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