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Kinetic of Formation of Ni and Pd Silicides: Determination of Interfacial Mobility and Interdiffusion Coefficient by In Situ Techniques

Khalid Hoummada 1 Dominique Mangelinck 1 Alain Portavoce 1
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02393989
Contributor : Alain Portavoce <>
Submitted on : Wednesday, December 4, 2019 - 3:50:22 PM
Last modification on : Monday, March 29, 2021 - 3:08:09 PM

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Khalid Hoummada, Dominique Mangelinck, Alain Portavoce. Kinetic of Formation of Ni and Pd Silicides: Determination of Interfacial Mobility and Interdiffusion Coefficient by In Situ Techniques. Solid State Phenomena, Trans Tech Publications Ltd 2011, 172-174, pp.640-645. ⟨10.4028/www.scientific.net/SSP.172-174.640⟩. ⟨hal-02393989⟩

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