Skip to Main content Skip to Navigation
Journal articles

Bridging the length scales between lithographic patterning and self assembly mechanisms in fabrication of semiconductor nanostructure arrays

Complete list of metadatas

https://hal-amu.archives-ouvertes.fr/hal-02394016
Contributor : Alain Portavoce <>
Submitted on : Wednesday, December 4, 2019 - 3:56:34 PM
Last modification on : Wednesday, January 8, 2020 - 2:01:24 AM

Links full text

Identifiers

Collections

Citation

R Hull, J Floro, M Gherasimova, J Graham, J. Gray, et al.. Bridging the length scales between lithographic patterning and self assembly mechanisms in fabrication of semiconductor nanostructure arrays. Journal of Physics: Conference Series, IOP Publishing, 2010, 209, pp.012003. ⟨10.1088/1742-6596/209/1/012003⟩. ⟨hal-02394016⟩

Share

Metrics

Record views

65