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Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing

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https://hal-amu.archives-ouvertes.fr/hal-02486957
Contributor : Mohammed Al-Kharaz <>
Submitted on : Friday, February 21, 2020 - 12:20:35 PM
Last modification on : Saturday, February 22, 2020 - 1:39:19 AM

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Mohammed Al-Kharaz, Bouchra Ananou, Mustapha Ouladsine, Michel Combal, Jacques Pinaton. Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing. 2019 6th International Conference on Control, Decision and Information Technologies (CoDIT), Apr 2019, Paris, France. pp.1155-1160, ⟨10.1109/CoDIT.2019.8820351⟩. ⟨hal-02486957⟩

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