Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

V. Sugiawati; Florence Vacandio; C. Perrin-Pellegrino; A. Galeyeva; A. Kurbatov; T. Djenizian

doi:10.1038/s41598-019-47464-2

Journal articles

Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

V. Sugiawati Florence Vacandio ¹ C. Perrin-Pellegrino ² A. Galeyeva A. Kurbatov T. Djenizian ³

1 MADIREL - Matériaux divisés, interfaces, réactivité, électrochimie

2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

3 Mines Saint-Etienne, Center of Microelectronics in Provence, Department of Flexible Electronics, 13541 Gardanne

Document type :

Journal articles

Domain :

Chemical Sciences / Material chemistry

Complete list of metadatas

https://hal-amu.archives-ouvertes.fr/hal-02649153
Contributor : Florence Vacandio <>
Submitted on : Friday, May 29, 2020 - 11:23:10 AM
Last modification on : Friday, January 15, 2021 - 3:20:53 AM

Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

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Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

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