Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

V. Sugiawati; Florence Vacandio; C. Perrin-Pellegrino; A. Galeyeva; A. Kurbatov; T. Djenizian

doi:10.1038/s41598-019-47464-2

Journal Articles Scientific Reports Year : 2019

Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

, (1) , (2) , , , (3)

1
2
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V. Sugiawati

Function : Author

Florence Vacandio

Function : Author
PersonId : 743254
IdHAL : vacandio
ORCID : 0000-0002-7814-363X
IdRef : 228251788

Matériaux divisés, interfaces, réactivité, électrochimie

C. Perrin-Pellegrino

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

A. Galeyeva

Function : Author

A. Kurbatov

Function : Author

T. Djenizian

Function : Author

Mines Saint-Etienne, Center of Microelectronics in Provence, Department of Flexible Electronics, 13541 Gardanne

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Chemical Sciences Material chemistry

FLORENCE VACANDIO : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-02649153

Submitted on : Friday, May 29, 2020-11:23:10 AM

Last modification on : Friday, March 24, 2023-2:53:16 PM

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hal-02649153 , version 1 (29-05-2020)

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HAL Id : hal-02649153 , version 1
DOI : 10.1038/s41598-019-47464-2
PUBMEDCENTRAL : PMC6671976

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V. Sugiawati, Florence Vacandio, C. Perrin-Pellegrino, A. Galeyeva, A. Kurbatov, et al.. Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries. Scientific Reports, 2019, 9 (1), ⟨10.1038/s41598-019-47464-2⟩. ⟨hal-02649153⟩

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Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

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