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Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

V. Sugiawati Florence Vacandio 1 C. Perrin-Pellegrino 2 A. Galeyeva A. Kurbatov T. Djenizian 3
1 MADIREL - Matériaux divisés, interfaces, réactivité, électrochimie
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
3 Mines Saint-Etienne, Center of Microelectronics in Provence, Department of Flexible Electronics, 13541 Gardanne
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https://hal-amu.archives-ouvertes.fr/hal-02649153
Contributor : Florence Vacandio Connect in order to contact the contributor
Submitted on : Friday, May 29, 2020 - 11:23:10 AM
Last modification on : Thursday, March 24, 2022 - 3:40:12 AM

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MADIREL | INC-CNRS | IM2NP | UNIV-TLN | UNIV-AMU | CNRS

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V. Sugiawati, Florence Vacandio, C. Perrin-Pellegrino, A. Galeyeva, A. Kurbatov, et al.. Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries. Scientific Reports, Nature Publishing Group, 2019, 9 (1), ⟨10.1038/s41598-019-47464-2⟩. ⟨hal-02649153⟩

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