Role of the active layer thickness on the sensitivity of WO<SUB align="right">3 gas sensors

K. Aguir; J. Gué; N.A. Rin; N. Mliki; Marc Bendahan

doi:10.1504/IJNT.2012.045349

Journal articles

Role of the active layer thickness on the sensitivity of WO_{3 gas sensors}

K. Aguir ¹ J. Gué N.A. Rin N. Mliki ² Marc Bendahan ³

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

2 département de physique de la faculté des sciences de Tunis

3 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Materials

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Environmental Sciences / Environmental Engineering

Complete list of metadatas

https://hal-amu.archives-ouvertes.fr/hal-02867381
Contributor : Marc Bendahan <>
Submitted on : Sunday, June 14, 2020 - 10:10:25 AM
Last modification on : Monday, June 15, 2020 - 3:30:33 AM

Role of the active layer thickness on the sensitivity of WO_{3 gas sensors}

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Role of the active layer thickness on the sensitivity of WO_{3 gas sensors}