Role of the active layer thickness on the sensitivity of WO_{3 gas sensors}

K. Aguir (1) , J. Gué , N.A. Rin , N. Mliki (2) , Marc Bendahan (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 département de physique de la faculté des sciences de Tunis

Domains: Engineering Sciences [physics]; Materials; Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Environmental Sciences; Environmental Engineering

K. Aguir, J. Gué, N.A. Rin, N. Mliki, Marc Bendahan. Role of the active layer thickness on the sensitivity of WO_{3 gas sensors. International Journal of Nanotechnology, 2012, 9 (3/4/5/6/7), pp.471. ⟨10.1504/IJNT.2012.045349⟩. ⟨hal-02867381⟩}