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Nanofabrication of optical structures (filters, resonators and sensors)

Abstract : We fabricated and characterized three types of nanostructures for photonic applications. Gold structures were used for light filtering in the infrared spectral region as well as for molecular sensing based on nanoplasmonics. Also, we fabricated silicon nanostructures showing Mie scattering resonances in the visible and near infrared spectral regions using alkaline etching and gold structures as mask. For all structures, we compare the experimental results vs theoretical modeling.
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https://hal-amu.archives-ouvertes.fr/hal-02888833
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Submitted on : Tuesday, May 11, 2021 - 5:33:55 PM
Last modification on : Tuesday, October 19, 2021 - 10:59:45 PM
Long-term archiving on: : Thursday, August 12, 2021 - 7:28:25 PM

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  • HAL Id : hal-02888833, version 1

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Frédéric Bedu, Nicolas Bonod, Mireille Commandre, Benjamin Demirdjian, Claude Henry, et al.. Nanofabrication of optical structures (filters, resonators and sensors). 4èmes Journees Nationales sur les Technologies Emergentes en Micronanofabrication, Nov 2015, Ecully, France. ⟨hal-02888833⟩

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