M. Gad-el-hak, Flow physics in mems, Mec. Ind, vol.2, pp.313-341, 2001.

A. Agrawal and S. V. Prabhu, Survey on measurement of tangential momentum 735 accommodation coefficient, Journal of Vac. Sci. Technol, vol.26, issue.4, p.736, 2008.

L. Stacy, A determination by the constant deflection method of the value 738 of the coefficient of slip for rough and for smooth surfaces in air, Phys. Rev, vol.739, pp.239-249, 1923.

M. Seidl and E. Steinheil, Measurement of momentum accommodation coeffi-741 cients on surfaces characterized by auger spectroscopy, sims and leed, p.742

, Rarefied Gas Dynamics, Proceedings of the 743

, Ninth International symposium, 1974.

L. B. Thomas and R. G. Lord, Proceedings of the Eighth Intenational 746 Symposium on Rarefied Gas Dynamics, pp.405-412, 1974.

D. Blanchard and P. Ligrani, Slip and accommodation coefficients from rar

Y. Chen, C. Zhang, M. Shi, and G. P. Peterson, Slip boundary for fluid flow at 763 rough surface, vol.100, p.74102, 2012.

M. S. Ozhgibesov, T. S. Leu, C. H. Cheng, and A. V. Utkin, Studies of argon 765 collisions with smooth and rough tungsten surface, Journal of Molecular 766 Graphics and Modelling, vol.45, pp.45-49, 2013.

W. Su, Y. Zhang, and L. Wu, Rarefaction cloaking: influence of the fractal 768 rough surface in gas slider bearings, Physics of Fluids, vol.29, p.102003, 2017.

S. Brull, P. Charrier, and L. Mieussens, Nanoscale roughness effect on maxwell-770 like boundary conditions for the boltzmann equation, Physics of Fluids, vol.28, p.82004, 2016.

T. Ewart, P. Perrier, I. A. Graur, and J. G. Méolans, Mass flow rate measure-773 ments in microchannel, from hydrodynamic to near free molecular regimes, 774 Fluid mechanics, vol.584, pp.337-356, 2007.

I. A. Graur, P. Perrier, W. Ghozlani, and J. G. Méolans, Measurements of 776 tangential momentum accommodation coefficient for various gases in plane 777 microchannel, Physics of Fluids, vol.21, p.102004, 2009.

J. G. Méolans, M. H. Nacer, M. Rojas, P. Perrier, and I. Graur, Effects of two 779 transversal finite dimensions in long microchannel: Analytical approach in 780 slip regime, Physics of Fluids, vol.24, p.112005, 2012.

J. Martya, L. Rousseaua, B. Saadanya, B. Merciera, and O. Francaisa, , p.782

Y. Mitab and T. Bourouina, Advanced etching of silicon based on deep re-783 active ion etching for silicon high aspect ratio microstructures and three-784 dimensional micro-and nanostructures, Microelectronics, vol.36, p.673, 2005.

B. Bhushan, Springer Handbook of Nanotechnology, p.787, 2007.

J. M. Thevenoud, B. Mercier, T. Bourouina, F. Marty, M. Puech et al.,

D. Nay and . Technology, Alcatel 789 Micro Machining System, 2012.

T. Ewart, P. Perrier, I. A. Graur, and J. G. Méolans, Mass flow rate measure-792 ments in gas micro flows, Experiments in Fluids, vol.41, issue.3, pp.487-498, 2006.