In-situ interferometric monitoring of optical coatings

Séverin L Nadji (1) , Michel Lequime (1) , Thomas Begou (1) , Cihan Koc (1) , Catherine Grèzes-Besset (2) , Julien Lumeau (1)

1 RCMO - RCMO
2 CILAS - Compagnie Industrielle des Lasers [Limoges]

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of an optical thin-film stack. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine.

Domains: Engineering Sciences [physics]; Optics / Photonic

Séverin L Nadji, Michel Lequime, Thomas Begou, Cihan Koc, Catherine Grèzes-Besset, et al.. In-situ interferometric monitoring of optical coatings. Optics Express, 2020, 28 (15), pp.22012-22026. ⟨10.1364/OE.394953⟩. ⟨hal-02996115⟩