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Journal Articles Optics Express Year : 2020

In-situ interferometric monitoring of optical coatings

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Séverin L Nadji
  • Function : Author
Michel Lequime
  • Function : Author
  • PersonId : 832181
Thomas Begou
  • Function : Author
Cihan Koc
  • Function : Author
Julien Lumeau

Abstract

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of an optical thin-film stack. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine.
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Dates and versions

hal-02996115 , version 1 (09-11-2020)

Licence

Attribution - CC BY 4.0

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Séverin L Nadji, Michel Lequime, Thomas Begou, Cihan Koc, Catherine Grèzes-Besset, et al.. In-situ interferometric monitoring of optical coatings. Optics Express, 2020, 28 (15), pp.22012-22026. ⟨10.1364/OE.394953⟩. ⟨hal-02996115⟩
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