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Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination

Abstract : In this work, the conductance behavior of tungsten trioxide based chemoresistive ozone sensors under ultra violet illumination was investigated. The tungsten trioxide sensitive layers were deposited on a SiO2/Si substrate by reactive radio frequency magnetron sputtering with several Argon / Oxygen ratios. The detection principle is based on a change in the conductance of the semiconductor oxides when ozone is present around the surface. We demonstrate the influence of Argon / Oxygen during the deposition of the sensitive layer, on ozone detection at 50°C under light illumination. The sensor shows good sensitivity to ozone, with a stable baseline, fast response and recovery time. These results are promising for the detection of ozone at low temperature.
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https://hal-amu.archives-ouvertes.fr/hal-03298464
Contributor : Sandrine Bernardini <>
Submitted on : Friday, July 23, 2021 - 4:09:17 PM
Last modification on : Friday, August 27, 2021 - 3:20:25 AM

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Distributed under a Creative Commons Attribution - NonCommercial 4.0 International License

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  • HAL Id : hal-03298464, version 1

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Clément Occelli, Sandrine Bernardini, Ludovic Le Roy, Tomas Fiorido, Jean-Luc Seguin, et al.. Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination. ALLSENSORS 2021, The Sixth International Conference on Advances in Sensors, Actuators, Metering and Sensing, Jul 2021, Nice, France. pp.28-31. ⟨hal-03298464⟩

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