Conference papers
Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination
Abstract : In this work, the conductance behavior of tungsten trioxide based chemoresistive ozone sensors under ultra violet illumination was investigated. The tungsten trioxide sensitive layers were deposited on a SiO2/Si substrate by reactive radio frequency magnetron sputtering with several Argon / Oxygen ratios. The detection principle is based on a change in the conductance of the semiconductor oxides when ozone is present around the surface. We demonstrate the influence of Argon / Oxygen during the deposition of the sensitive layer, on ozone detection at 50°C under light illumination. The sensor shows good sensitivity to ozone, with a stable baseline, fast response and recovery time. These results are promising for the detection of ozone at low temperature.
https://hal-amu.archives-ouvertes.fr/hal-03298464
Contributor : Sandrine Bernardini <>
Submitted on : Friday, July 23, 2021 - 4:09:17 PM
Last modification on : Friday, August 27, 2021 - 3:20:25 AM
Contributor : Sandrine Bernardini <>
Submitted on : Friday, July 23, 2021 - 4:09:17 PM
Last modification on : Friday, August 27, 2021 - 3:20:25 AM
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allsensors_2021_1_50_70026.pdf
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