Conference papers
Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination
Abstract : In this work, the conductance behavior of tungsten trioxide based chemoresistive ozone sensors under ultra violet illumination was investigated. The tungsten trioxide sensitive layers were deposited on a SiO2/Si substrate by reactive radio frequency magnetron sputtering with several Argon / Oxygen ratios. The detection principle is based on a change in the conductance of the semiconductor oxides when ozone is present around the surface. We demonstrate the influence of Argon / Oxygen during the deposition of the sensitive layer, on ozone detection at 50°C under light illumination. The sensor shows good sensitivity to ozone, with a stable baseline, fast response and recovery time. These results are promising for the detection of ozone at low temperature.
https://hal-amu.archives-ouvertes.fr/hal-03298464
Contributor : Sandrine Bernardini Connect in order to contact the contributor
Submitted on : Friday, July 23, 2021 - 4:09:17 PM
Last modification on : Tuesday, October 19, 2021 - 10:50:07 PM
Long-term archiving on: : Sunday, October 24, 2021 - 6:51:00 PM
Contributor : Sandrine Bernardini Connect in order to contact the contributor
Submitted on : Friday, July 23, 2021 - 4:09:17 PM
Last modification on : Tuesday, October 19, 2021 - 10:50:07 PM
Long-term archiving on: : Sunday, October 24, 2021 - 6:51:00 PM
File
allsensors_2021_1_50_70026.pdf
Files produced by the author(s)
Licence
Distributed under a Creative Commons Attribution - NonCommercial 4.0 International License