Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination

Clément Occelli (1) , Sandrine Bernardini (1) , Ludovic Le Roy (1) , Tomas Fiorido (1) , Jean-Luc Seguin (1) , Carine Perrin-Pellegrino (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

In this work, the conductance behavior of tungsten trioxide based chemoresistive ozone sensors under ultra violet illumination was investigated. The tungsten trioxide sensitive layers were deposited on a SiO2/Si substrate by reactive radio frequency magnetron sputtering with several Argon / Oxygen ratios. The detection principle is based on a change in the conductance of the semiconductor oxides when ozone is present around the surface. We demonstrate the influence of Argon / Oxygen during the deposition of the sensitive layer, on ozone detection at 50°C under light illumination. The sensor shows good sensitivity to ozone, with a stable baseline, fast response and recovery time. These results are promising for the detection of ozone at low temperature.

Keywords: Gas sensors; UV activation; Electronic traps; Ozone; Environment; Health

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

Clément Occelli, Sandrine Bernardini, Ludovic Le Roy, Tomas Fiorido, Jean-Luc Seguin, et al.. Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination. ALLSENSORS 2021, The Sixth International Conference on Advances in Sensors, Actuators, Metering and Sensing, Jul 2021, Nice, France. pp.28-31. ⟨hal-03298464⟩