Journal articles
Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant
https://hal-amu.archives-ouvertes.fr/hal-03350129
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 10:30:34 AM
Last modification on : Thursday, June 23, 2022 - 11:40:31 AM
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 10:30:34 AM
Last modification on : Thursday, June 23, 2022 - 11:40:31 AM
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