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Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant

D. Kobor R. Ndioukane O. Palais 1 M. Touré A. Diallo N. Fall M. Biagui 
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-03350129
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 10:30:34 AM
Last modification on : Thursday, June 23, 2022 - 11:40:31 AM

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UNIV-TLN | CNRS | UNIV-AMU | IM2NP

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D. Kobor, R. Ndioukane, O. Palais, M. Touré, A. Diallo, et al.. Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant. Applied Physics Research, Canadian Center of Science and Education, 2015, 7 (2), ⟨10.5539/apr.v7n2p49⟩. ⟨hal-03350129⟩

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