Journal articles
Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant
https://hal-amu.archives-ouvertes.fr/hal-03350129
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 10:30:34 AM
Last modification on : Tuesday, October 19, 2021 - 10:50:07 PM
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 10:30:34 AM
Last modification on : Tuesday, October 19, 2021 - 10:50:07 PM
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