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Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant

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https://hal-amu.archives-ouvertes.fr/hal-03350129
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 10:30:34 AM
Last modification on : Tuesday, October 19, 2021 - 10:50:07 PM

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D. Kobor, R. Ndioukane, O. Palais, M. Touré, A. Diallo, et al.. Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant. Applied Physics Research, 2015, 7 (2), ⟨10.5539/apr.v7n2p49⟩. ⟨hal-03350129⟩

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