Scanning techniques applied to the characterisation of P and N type multicrystalline silicon

S. Martinuzzi; O. Palais; S. Ostapenko

doi:10.1016/j.mssp.2006.01.079

Journal Articles Materials Science in Semiconductor Processing Year : 2006

Scanning techniques applied to the characterisation of P and N type multicrystalline silicon

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S. Martinuzzi

Function : Author

O. Palais

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

S. Ostapenko

Function : Author

University of South Florida [Tampa]

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Physics [physics]

Olivier Palais : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-03350274

Submitted on : Tuesday, September 21, 2021-11:05:08 AM

Last modification on : Wednesday, February 8, 2023-5:11:19 PM

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hal-03350274 , version 1 (21-09-2021)

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HAL Id : hal-03350274 , version 1
DOI : 10.1016/j.mssp.2006.01.079

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S. Martinuzzi, O. Palais, S. Ostapenko. Scanning techniques applied to the characterisation of P and N type multicrystalline silicon. Materials Science in Semiconductor Processing, 2006, 9 (1-3), pp.230-235. ⟨10.1016/j.mssp.2006.01.079⟩. ⟨hal-03350274⟩

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Scanning techniques applied to the characterisation of P and N type multicrystalline silicon

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