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Scanning techniques applied to the characterisation of P and N type multicrystalline silicon

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https://hal-amu.archives-ouvertes.fr/hal-03350274
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 11:05:08 AM
Last modification on : Tuesday, October 19, 2021 - 10:50:07 PM

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S. Martinuzzi, O. Palais, S. Ostapenko. Scanning techniques applied to the characterisation of P and N type multicrystalline silicon. Materials Science in Semiconductor Processing, Elsevier, 2006, 9 (1-3), pp.230-235. ⟨10.1016/j.mssp.2006.01.079⟩. ⟨hal-03350274⟩

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