Scanning techniques applied to the characterisation of P and N type multicrystalline silicon

S. Martinuzzi , O. Palais (1) , S. Ostapenko (2)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 USF - University of South Florida [Tampa]

Domaines: Physique [physics]

S. Martinuzzi, O. Palais, S. Ostapenko. Scanning techniques applied to the characterisation of P and N type multicrystalline silicon. Materials Science in Semiconductor Processing, 2006, 9 (1-3), pp.230-235. ⟨10.1016/j.mssp.2006.01.079⟩. ⟨hal-03350274⟩