Behaviour of metallic impurities at grain boundaries and dislocation clusters in multicrystalline silicon wafers deduced from contactless lifetime scan maps

P Hidalgo , O Palais (1) , S Martinuzzi

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Physique [physics]

P Hidalgo, O Palais, S Martinuzzi. Behaviour of metallic impurities at grain boundaries and dislocation clusters in multicrystalline silicon wafers deduced from contactless lifetime scan maps. Journal of Physics: Condensed Matter, 2004, 16 (2), pp.S19-S24. ⟨10.1088/0953-8984/16/2/003⟩. ⟨hal-03350292⟩