Mapping of minority carrier lifetime and mobility in imperfect silicon wafers

O. Palais; L. Clerc; A. Arcari; M. Stemmer; S. Martinuzzi

doi:10.1016/S0921-5107(02)00652-9

Journal Articles Materials Science and Engineering: B Year : 2003

Mapping of minority carrier lifetime and mobility in imperfect silicon wafers

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1

O. Palais

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

L. Clerc

Function : Author

A. Arcari

Function : Author

M. Stemmer

Function : Author

S. Martinuzzi

Function : Author

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Physics [physics]

Olivier Palais : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-03350299

Submitted on : Tuesday, September 21, 2021-11:14:28 AM

Last modification on : Tuesday, October 19, 2021-10:50:07 PM

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hal-03350299 , version 1 (21-09-2021)

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HAL Id : hal-03350299 , version 1
DOI : 10.1016/S0921-5107(02)00652-9

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O. Palais, L. Clerc, A. Arcari, M. Stemmer, S. Martinuzzi. Mapping of minority carrier lifetime and mobility in imperfect silicon wafers. Materials Science and Engineering: B, 2003, 102 (1-3), pp.184-188. ⟨10.1016/S0921-5107(02)00652-9⟩. ⟨hal-03350299⟩

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Mapping of minority carrier lifetime and mobility in imperfect silicon wafers

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