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Minority carrier lifetime scan maps applied to iron concentration mapping in silicon wafers

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https://hal-amu.archives-ouvertes.fr/hal-03350311
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 11:17:25 AM
Last modification on : Wednesday, February 2, 2022 - 9:46:11 AM

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O. Palais, E. Yakimov, S. Martinuzzi. Minority carrier lifetime scan maps applied to iron concentration mapping in silicon wafers. Materials Science and Engineering: B, 2002, 91-92, pp.216-219. ⟨10.1016/S0921-5107(01)00998-9⟩. ⟨hal-03350311⟩

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