Minority carrier lifetime scan map in crystalline silicon wafers

J. Gervais; O. Palais; L. Clerc; S. Martinuzzi

doi:10.1063/1.1150032

Journal Articles Review of Scientific Instruments Year : 1999

Minority carrier lifetime scan map in crystalline silicon wafers

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1

J. Gervais

Function : Author

O. Palais

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

L. Clerc

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S. Martinuzzi

Function : Author

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Physics [physics]

Olivier Palais : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-03350329

Submitted on : Tuesday, September 21, 2021-11:23:25 AM

Last modification on : Friday, March 24, 2023-2:53:22 PM

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hal-03350329 , version 1 (21-09-2021)

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HAL Id : hal-03350329 , version 1
DOI : 10.1063/1.1150032

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J. Gervais, O. Palais, L. Clerc, S. Martinuzzi. Minority carrier lifetime scan map in crystalline silicon wafers. Review of Scientific Instruments, 1999, 70 (10), pp.4044-4046. ⟨10.1063/1.1150032⟩. ⟨hal-03350329⟩

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