PdAu Based Resistive Hydrogen Sensor in Anaerobic Environment

Clément Occelli (1) , Tomas Fiorido (1) , Carine Perrin-Pellegrino (1) , Jean-Luc Seguin (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Hydrogen is a promising gas for greenhouse gas emission reduction but also a reactive one. Thus, sensor for hydrogen detection in various atmospheres is mandatory. While leak sensors in air environments have been widely studied, only few researches have been done for hydrogen detection in anaerobic environments. In this work, the electrical resistance variation of a PdAu alloy as a sensitive film, is studied at various temperatures for hydrogen exposures in an anaerobic (N2) environment. The Pd0.8Au0.2 alloy was deposited on a Si/SiO2 substrate using magnetron sputtering followed by annealing at 200°C in N2. The sensor was then tested at various temperatures for 0.3% H2 exposure, the best operating temperature was found to be 50°C. Finally, sensor was able to detect at 50°C, concentrations from 0.3 to 3% H2. These preliminary results are promising for further development of hydrogen sensors in anaerobic environment.

Mots clés: PdAu; Resistive sensor; Anaerobic; Hydrogen

Domaines: Micro et nanotechnologies/Microélectronique; Matériaux

Clément Occelli, Tomas Fiorido, Carine Perrin-Pellegrino, Jean-Luc Seguin. PdAu Based Resistive Hydrogen Sensor in Anaerobic Environment. SENSORCOMM 2021, Nov 2021, Athen, Greece. ⟨hal-03428722⟩