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Local activation of light-induced degradation in co-doped boron-phosphorus silicon: Evidence of defect diffusion phenomena

Abstract : This study is interested in the local activation of Light-induced degradation (LID) defect in highly co-doped silicon wafers with boron and phosphorus. For this purpose, the experiments are focused on measuring the minority carrier lifetime before and after LID activation via a mapping technique. The LID defect density exhibits a Gaussian distribution centered on the excitation point of the laser beam; the intensity of the Gaussian distribution of the LID defect varies with the concentration of the co-dopants. The lifetime of the minority carriers decreases in all-silicon sample regions, while the excitation laser beam focuses on an area of approximately one mm2. This observation indicates that LID defects are activated even in the unexcited areas of silicon wafers, suggesting a LID diffusion phenomenon from the laser excitation point to the whole silicon wafer. We deduce that a high phosphorus doping level in silicon wafers leads to a significant reduction in the LID effect.
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https://hal-amu.archives-ouvertes.fr/hal-03512883
Contributor : Olivier Palais Connect in order to contact the contributor
Submitted on : Monday, March 7, 2022 - 3:55:18 PM
Last modification on : Monday, April 11, 2022 - 1:40:00 PM
Long-term archiving on: : Wednesday, June 8, 2022 - 8:44:25 PM

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M. Najjar, B. Dridi Rezgui, M. Bouaicha, O. Palais, B. Bessais, et al.. Local activation of light-induced degradation in co-doped boron-phosphorus silicon: Evidence of defect diffusion phenomena. Materials Science in Semiconductor Processing, 2021, 135, pp.106104. ⟨10.1016/j.mssp.2021.106104⟩. ⟨hal-03512883⟩

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