BaTiO 3 sensitive film enhancement for CO 2 detection

Fabien Le Pennec , El Halabi Amine , Sandrine Bernardini , Carine Perrin-Pellegrino , Khalifa Aguir , Marc Bendahan (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

A barium titanate thin film was deposited by drop coating for carbon dioxide detection. The measurements are based on a resistance change and provided a sensitive response to different CO2 concentrations under a humidity environment. The concentration measurement range was between 100 and 5000 ppm of CO2 in synthetic air, and likewise, the relative humidity was between 20 and 70%. The response and recovery times of the BaTiO3 based resistive sensors were determined to 2 min and 4 min, respectively, for 400 ppm of carbon dioxide and 50% relative humidity.

Domaines: Sciences de l'ingénieur [physics]; Physique [physics]

Fabien Le Pennec, El Halabi Amine, Sandrine Bernardini, Carine Perrin-Pellegrino, Khalifa Aguir, et al.. BaTiO 3 sensitive film enhancement for CO 2 detection. IEEE, pp.1-4, 2020, ⟨10.1109/SENSORS47125.2020.9278726⟩. ⟨hal-03941458⟩