In situ X-ray diffraction studies of the piezoelectric behavior of PZT thin films

T.W. Cornelius (1) , C. Mocuta , S. Escoubas (1) , E.C. Lima , E.B. Araujo , O. Thomas (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Micro et nanotechnologies/Microélectronique

T.W. Cornelius, C. Mocuta, S. Escoubas, E.C. Lima, E.B. Araujo, et al.. In situ X-ray diffraction studies of the piezoelectric behavior of PZT thin films. Meeting of the French Crystallography Association (AFC 2016), Jul 2016, Marseille, France. ⟨hal-01453244⟩