HRTEM study of structural defects and related deformation mechanisms induced by nanocompression of silicon

A. Merabet; M. Texier; C. Tromas; M. Verdier; A. Talneau; O. Thomas; J. Godet

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HRTEM study of structural defects and related deformation mechanisms induced by nanocompression of silicon

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1
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A. Merabet

Function : Author

M. Texier

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

C. Tromas

Function : Author

Institut Pprime

M. Verdier

Function : Author
PersonId : 742072
IdHAL : marc-verdier
ORCID : 0000-0003-0563-2675
IdRef : 123967678

A. Talneau

Function : Author

O. Thomas

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

J. Godet

Function : Author
PersonId : 743379
IdHAL : julien-godet
ORCID : 0000-0002-5831-2256
IdRef : 083156259

Institut Pprime

Domains

Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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Submitted on : Thursday, February 2, 2017-4:50:48 PM

Last modification on : Wednesday, February 8, 2023-5:11:01 PM

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hal-01453338 , version 1 (02-02-2017)

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HAL Id : hal-01453338 , version 1

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A. Merabet, M. Texier, C. Tromas, M. Verdier, A. Talneau, et al.. HRTEM study of structural defects and related deformation mechanisms induced by nanocompression of silicon. European Microscopy Congress, Aug 2016, Lyon, France. ⟨hal-01453338⟩

HRTEM study of structural defects and related deformation mechanisms induced by nanocompression of silicon

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