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Detection and mapping of oxygen in silicon wafers by scanning infrared absorption

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https://hal-amu.archives-ouvertes.fr/hal-01757688
Contributor : Philippe Torchio <>
Submitted on : Tuesday, April 3, 2018 - 7:22:48 PM
Last modification on : Tuesday, March 30, 2021 - 3:22:44 AM

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Philippe Torchio, Roland Occelli. Detection and mapping of oxygen in silicon wafers by scanning infrared absorption. International Journal of Infrared and Millimeter Waves, Springer Verlag, 1997, 18 (2), pp.491 - 499. ⟨10.1007/BF02677935⟩. ⟨hal-01757688⟩

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