Highly Sensitive WO3 Thin Films Integrated on Microsensor Platforms for ppb BTEX Detection in a Gas Mixture with High Rate of Humidity - Archive ouverte HAL Access content directly
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Highly Sensitive WO3 Thin Films Integrated on Microsensor Platforms for ppb BTEX Detection in a Gas Mixture with High Rate of Humidity

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Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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https://hal-amu.archives-ouvertes.fr/hal-01781864

Submitted on : Monday, April 30, 2018-6:32:34 PM

Last modification on : Wednesday, February 8, 2023-5:11:04 PM

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hal-01781864 , version 1 (30-04-2018)

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  • HAL Id : hal-01781864 , version 1

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Alexandre Favard, Thierry Contaret, Khalifa Aguir, Antoine Dumas, Marc Bendahan. Highly Sensitive WO3 Thin Films Integrated on Microsensor Platforms for ppb BTEX Detection in a Gas Mixture with High Rate of Humidity. IEEE SENSORS, Oct 2017, Glasgow, United Kingdom. ⟨hal-01781864⟩

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