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Highly Sensitive WO3 Thin Films Integrated on Microsensor Platforms for ppb BTEX Detection in a Gas Mixture with High Rate of Humidity

Alexandre Favard 1 Thierry Contaret Khalifa Aguir 1 Antoine Dumas Marc Bendahan 1
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-01781864
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Submitted on : Monday, April 30, 2018 - 6:32:34 PM
Last modification on : Wednesday, November 3, 2021 - 7:27:48 AM

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  • HAL Id : hal-01781864, version 1

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Alexandre Favard, Thierry Contaret, Khalifa Aguir, Antoine Dumas, Marc Bendahan. Highly Sensitive WO3 Thin Films Integrated on Microsensor Platforms for ppb BTEX Detection in a Gas Mixture with High Rate of Humidity. IEEE SENSORS, Oct 2017, Glasgow, United Kingdom. ⟨hal-01781864⟩

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