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Journal Articles Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Year : 1998

New insights on SiGe growth instabilities

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hal-01964195 , version 1 (21-12-2018)

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  • HAL Id : hal-01964195 , version 1

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I. Berbezier, B. Gallas, Laurent Lapena, J Fernandez, J. Derrien, et al.. New insights on SiGe growth instabilities. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 1998, 16 (3), pp.1582. ⟨hal-01964195⟩
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