New insights on SiGe growth instabilities

I. Berbezier; B. Gallas; Laurent Lapena; J Fernandez; J. Derrien; B Joyce

Journal Articles Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Year : 1998

New insights on SiGe growth instabilities

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1
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I. Berbezier

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

B. Gallas

Function : Author

Laurent Lapena

Function : Author
PersonId : 171022
IdHAL : laurent-lapena

Centre Interdisciplinaire de Nanoscience de Marseille

J Fernandez

Function : Author

J. Derrien

Function : Author

Centre Interdisciplinaire de Nanoscience de Marseille

B Joyce

Function : Author

Domains

Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci]

laurent lapena : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-01964195

Submitted on : Friday, December 21, 2018-5:39:33 PM

Last modification on : Tuesday, October 19, 2021-11:00:02 PM

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hal-01964195 , version 1 (21-12-2018)

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HAL Id : hal-01964195 , version 1

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I. Berbezier, B. Gallas, Laurent Lapena, J Fernandez, J. Derrien, et al.. New insights on SiGe growth instabilities. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 1998, 16 (3), pp.1582. ⟨hal-01964195⟩

New insights on SiGe growth instabilities

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