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New insights on SiGe growth instabilities

I. Berbezier 1 B. Gallas Laurent Lapena 2 J Fernandez J. Derrien 2 B Joyce
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 CINaM - Centre Interdisciplinaire de Nanoscience de Marseille
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https://hal-amu.archives-ouvertes.fr/hal-01964195
Contributor : Laurent Lapena <>
Submitted on : Friday, December 21, 2018 - 5:39:33 PM
Last modification on : Tuesday, April 7, 2020 - 10:00:06 AM

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  • HAL Id : hal-01964195, version 1

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I. Berbezier, B. Gallas, Laurent Lapena, J Fernandez, J. Derrien, et al.. New insights on SiGe growth instabilities. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, American Vacuum Society (AVS), 1998, 16 (3), pp.1582. ⟨hal-01964195⟩

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