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The polyimide (PMDA-ODA) titanium interface. Part 2. XPS study of polyimide treatments and ageing

Christophe Girardeaux 1, 2 Evelyne Druet Philippe Demoncy Michel Delamar 3 
1 L2MP - Laboratoire matériaux et microélectronique de Provence
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
3 ITODYS (UMR_7086) - Interfaces, Traitements, Organisation et Dynamique des Systèmes
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https://hal-amu.archives-ouvertes.fr/hal-02045088
Contributor : Christophe Girardeaux Connect in order to contact the contributor
Submitted on : Thursday, February 21, 2019 - 6:02:57 PM
Last modification on : Wednesday, December 15, 2021 - 9:56:53 AM

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  • HAL Id : hal-02045088, version 1

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UNIV-PARIS7 | UNIV-TLN | CNRS | UNIV-AMU | IM2NP | INC-CNRS | UNIV-PARIS | UP-SCIENCES

Citation

Christophe Girardeaux, Evelyne Druet, Philippe Demoncy, Michel Delamar. The polyimide (PMDA-ODA) titanium interface. Part 2. XPS study of polyimide treatments and ageing. Journal of Electron Spectroscopy and Related Phenomena, Elsevier, 1995, 74 (1), pp.57-66. ⟨hal-02045088⟩

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