A novel in-situ SOI characterization technique: the intrinsic point-probe MOSFET

A.M. Ionescu (1) , Daniela Munteanu (2)

1 Electronics Laboratory, Center of Micro
2 IMEP - Institut de Microélectronique, Electromagnétisme et Photonique

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

A.M. Ionescu, Daniela Munteanu. A novel in-situ SOI characterization technique: the intrinsic point-probe MOSFET. IEEE Electron Device Letters, 2001, 22 (4), pp.166-169. ⟨10.1109/55.915601⟩. ⟨hal-02132540⟩