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Boron clustering in implanted NiSi

A. Portavoce 1 I. Blum 1 D. Mangelinck 1 K. Hoummada 1 L. Chow V. Carron J.L. Labar 2
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 MTA EK MFA, Konkoly Thege, Hungary
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https://hal-amu.archives-ouvertes.fr/hal-02385405
Contributor : Alain Portavoce <>
Submitted on : Thursday, November 28, 2019 - 5:42:16 PM
Last modification on : Monday, December 14, 2020 - 3:08:16 AM

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A. Portavoce, I. Blum, D. Mangelinck, K. Hoummada, L. Chow, et al.. Boron clustering in implanted NiSi. Scripta Materialia, Elsevier, 2011, 64 (9), pp.828-831. ⟨10.1016/j.scriptamat.2011.01.015⟩. ⟨hal-02385405⟩

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