Boron clustering in implanted NiSi

A. Portavoce (1) , I. Blum (1) , D. Mangelinck (1) , K. Hoummada (1) , L. Chow , V. Carron , J.L. Labar (2)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 MTA EK MFA, Konkoly Thege, Hungary

Domains: Physics [physics]; Condensed Matter [cond-mat]; Materials Science [cond-mat.mtrl-sci]

A. Portavoce, I. Blum, D. Mangelinck, K. Hoummada, L. Chow, et al.. Boron clustering in implanted NiSi. Scripta Materialia, 2011, 64 (9), pp.828-831. ⟨10.1016/j.scriptamat.2011.01.015⟩. ⟨hal-02385405⟩