Differential scanning calorimetry measurements of kinetic factors involved in salicide process

K. Hoummada (1) , A. Portavoce (1) , C. Perrin-Pellegrino (1) , D. Mangelinck (1) , C. Bergman

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domaines: Science des matériaux [cond-mat.mtrl-sci]

K. Hoummada, A. Portavoce, C. Perrin-Pellegrino, D. Mangelinck, C. Bergman. Differential scanning calorimetry measurements of kinetic factors involved in salicide process. Applied Physics Letters, 2008, 92 (13), pp.133109. ⟨10.1063/1.2905293⟩. ⟨hal-02386166⟩