Evaluation of scanning capacitance microscopy sample preparation by focused ion beam - Archive ouverte HAL Access content directly
Journal Articles Microelectronics Reliability Year : 2006

Dates and versions

hal-02386240 , version 1 (29-11-2019)

Identifiers

Cite

N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, C. Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, 2006, 46 (9-11), pp.1554-1557. ⟨10.1016/j.microrel.2006.07.019⟩. ⟨hal-02386240⟩
29 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More