Journal Articles
Microelectronics Reliability
Year : 2006
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https://hal-amu.archives-ouvertes.fr/hal-02386240
Submitted on : Friday, November 29, 2019-11:27:40 AM
Last modification on : Friday, March 24, 2023-2:53:14 PM
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- HAL Id : hal-02386240 , version 1
- DOI : 10.1016/j.microrel.2006.07.019
Cite
N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, C. Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, 2006, 46 (9-11), pp.1554-1557. ⟨10.1016/j.microrel.2006.07.019⟩. ⟨hal-02386240⟩
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