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Evaluation of scanning capacitance microscopy sample preparation by focused ion beam

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https://hal-amu.archives-ouvertes.fr/hal-02386240
Contributor : Alain Portavoce <>
Submitted on : Friday, November 29, 2019 - 11:27:40 AM
Last modification on : Saturday, November 30, 2019 - 1:44:17 AM

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N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, C. Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, Elsevier, 2006, 46 (9-11), pp.1554-1557. ⟨10.1016/j.microrel.2006.07.019⟩. ⟨hal-02386240⟩

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