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Sb lattice diffusion in Si 1 − x Ge x / Si ( 001 ) heterostructures: Chemical and stress effects

A. Portavoce 1 P. Gas 2 I. Berbezier 1 A. Ronda 2 J. Christensen A. yu. V. Kuznetsov 3 B. Svensson 
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 L2MP - Laboratoire matériaux et microélectronique de Provence
3 Mathematical Institute
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https://hal-amu.archives-ouvertes.fr/hal-02386280
Contributor : Alain Portavoce Connect in order to contact the contributor
Submitted on : Friday, November 29, 2019 - 11:36:57 AM
Last modification on : Tuesday, October 19, 2021 - 11:00:04 PM

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A. Portavoce, P. Gas, I. Berbezier, A. Ronda, J. Christensen, et al.. Sb lattice diffusion in Si 1 − x Ge x / Si ( 001 ) heterostructures: Chemical and stress effects. Physical Review B: Condensed Matter and Materials Physics (1998-2015), American Physical Society, 2004, 69 (15), ⟨10.1103/PhysRevB.69.155415⟩. ⟨hal-02386280⟩

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