Ge dots self-assembling: Surfactant mediated growth of Ge on SiGe (118) stress-induced kinetic instabilities

I. Berbezier (1) , A. Ronda (2) , A. Portavoce (1) , N. Motta

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 L2MP - Laboratoire matériaux et microélectronique de Provence

Domaines: Science des matériaux [cond-mat.mtrl-sci]

I. Berbezier, A. Ronda, A. Portavoce, N. Motta. Ge dots self-assembling: Surfactant mediated growth of Ge on SiGe (118) stress-induced kinetic instabilities. Applied Physics Letters, 2003, 83 (23), pp.4833-4835. ⟨10.1063/1.1633012⟩. ⟨hal-02386291⟩