Optimized Testing Chamber for Qualified Sensor Responses Measurement

Fatima Ezahra Annanouch (1) , Marc Bendahan (1) , Gilles Bouchet (2) , Pierre Perrier (2) , Nicolas Morati (1) , Virginie Martini-Laithier (1) , Tomas Fiorido (1) , Khalifa Aguir (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 IUSTI - Institut universitaire des systèmes thermiques industriels

It is important to size and optimize the testing chamber in order to ensure a qualified sensor response measurement. Indeed, the amplitude, as well as the response and recovery times are very dependent on the testing chamber. In this study, we show that by optimizing the design and reducing the volume of the testing chamber, the responses of metal oxide microsensors are highly enhanced and faster, and therefore closer to the real behavior of the sensor.

Mots clés: Gas sensor; Gas testing chamber; Metal oxides; Tin oxide; Mathematical modeling; Simulation

Domaines: Instrumentations et Détecteurs [physics.ins-det]

Fatima Ezahra Annanouch, Marc Bendahan, Gilles Bouchet, Pierre Perrier, Nicolas Morati, et al.. Optimized Testing Chamber for Qualified Sensor Responses Measurement. Sensors & Transducers., 2018, 222 (6), pp.12 - 17. ⟨hal-02407313⟩