Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

R. Boulmani; Marc Bendahan; C. Lambert-Mauriat; M. Gillet; K. Aguir

doi:10.1016/j.snb.2007.03.011

Journal articles

Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

R. Boulmani Marc Bendahan ¹ C. Lambert-Mauriat ¹ M. Gillet K. Aguir ¹

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Materials

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Environmental Sciences / Environmental Engineering

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https://hal-amu.archives-ouvertes.fr/hal-02867396
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Submitted on : Sunday, June 14, 2020 - 10:27:19 AM
Last modification on : Tuesday, October 19, 2021 - 11:00:04 PM

Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

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Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

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