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Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

R. Boulmani Marc Bendahan 1 C. Lambert-Mauriat 1 M. Gillet K. Aguir 1
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02867396
Contributor : Marc Bendahan <>
Submitted on : Sunday, June 14, 2020 - 10:27:19 AM
Last modification on : Thursday, April 1, 2021 - 10:04:01 AM

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R. Boulmani, Marc Bendahan, C. Lambert-Mauriat, M. Gillet, K. Aguir. Correlation between rf-sputtering parameters and WO3 sensor response towards ozone. Sensors and Actuators B: Chemical, Elsevier, 2007, 125 (2), pp.622-627. ⟨10.1016/j.snb.2007.03.011⟩. ⟨hal-02867396⟩

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