Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

R. Boulmani; Marc Bendahan; C. Lambert-Mauriat; M. Gillet; K. Aguir

doi:10.1016/j.snb.2007.03.011

Journal Articles Sensors and Actuators B: Chemical Year : 2007

Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

, (1) , (1) , , (1)

1

R. Boulmani

Function : Author

Marc Bendahan

Function : Author
PersonId : 18209
IdHAL : marc-bendahan
IdRef : 074292633

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

C. Lambert-Mauriat

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

M. Gillet

Function : Author

K. Aguir

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

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Engineering Sciences [physics] Materials Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics Environmental Sciences Environmental Engineering

Marc Bendahan : Connect in order to contact the contributor

https://hal-amu.archives-ouvertes.fr/hal-02867396

Submitted on : Sunday, June 14, 2020-10:27:19 AM

Last modification on : Friday, March 24, 2023-2:53:17 PM

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hal-02867396 , version 1 (14-06-2020)

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HAL Id : hal-02867396 , version 1
DOI : 10.1016/j.snb.2007.03.011

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R. Boulmani, Marc Bendahan, C. Lambert-Mauriat, M. Gillet, K. Aguir. Correlation between rf-sputtering parameters and WO3 sensor response towards ozone. Sensors and Actuators B: Chemical, 2007, 125 (2), pp.622-627. ⟨10.1016/j.snb.2007.03.011⟩. ⟨hal-02867396⟩

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Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

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