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Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films

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https://hal-amu.archives-ouvertes.fr/hal-03350227
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Submitted on : Tuesday, September 21, 2021 - 10:50:33 AM
Last modification on : Friday, December 17, 2021 - 9:20:03 AM

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B. Rezgui, A. Sibai, T. Nychyporuk, M. Lemiti, G. Bremond, et al.. Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films. Applied Physics Letters, American Institute of Physics, 2010, 96 (18), pp.183105. ⟨10.1063/1.3427386⟩. ⟨hal-03350227⟩

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