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PLANETE – Platform for micro and nanofabrication


The goal of this poster presentation is to give an overview of nanofabrication techniques commonly used for the realization of nanostructures in our micro and nanofabrication facilities. We focus on the process equipment available in the CINaM clean room. We will also present some recent scientific results in photonics obtained on plasmonics nano-arrays for molecular sensing (collaboration with B. Demirdjian’s group) [1] and on transition metal dichalcogenide structures showing a non-linear coupling between excitons and Mie scattering resonances in the visible and near infrared spectral regions (collaboration with G. Tselikov) [2]. We will also present the fabrication of nanocluster arrays used for detection of hidden features in the architecture of T-lymphocyte cells (collaboration with K. Sengupta’s group) [3]. Finally, we will present our recent results on fabrication of sharp silicon arrays to wound Caenorhabditis elegans worms (collaboration with J.J. Ewbank’s group) [4]. All micro and nanostructures were obtained in our clean room facilities using nanofabrication tools such as optical and electron beam lithography, magnetron sputtering or thermal evaporation and chemical or reactive ion etching. The PLANETE platform is open to the regional scientific research community as well as to innovative companies carrying out research and development projects. All the cleanroom facilities and equipment are available to them to carry out their projects with technical assistance from the platform staff according to their needs. [1] B. Demirdjian, I. Ozerov, F. Bedu, A. Ranguis, and C.R. Henry, ACS Omega 6, 13398 (2021) [2] A.A. Popkova et al. Laser & Photonics Reviews 16, 2100604 (2022) [3] A. Nassereddine et al. Nano Letters 21, 5606 (2022) [3] J. Belougne, I. Ozerov, C. Caillard, F. Bedu, J.J. Ewbank, Scientific Reports 10, 3581 (2020)
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hal-03782211 , version 1 (21-09-2022)


  • HAL Id : hal-03782211 , version 1


Igor Ozerov, F. Bedu. PLANETE – Platform for micro and nanofabrication. Meeting on Nanosciences Advances (MNA 2022), Sep 2022, Porquerolles, France. ⟨hal-03782211⟩
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