Fabrication of spectrally sharp Si-based dielectric resonators: combining etaloning with Mie resonances

D. Toliopoulos , M. Khoury , M. Bouabdellaoui , N. Granchi , J.-B. Claude , A. Benali , I. Berbezier (1) , D. Hannani , A. Ronda , J. Wenger (2) , M. Bollani , M. Gurioli , S. Sanguinetti , F. Intonti , M. Abbarchi

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 FRESNEL - Institut FRESNEL

Domains: Engineering Sciences [physics]

D. Toliopoulos, M. Khoury, M. Bouabdellaoui, N. Granchi, J.-B. Claude, et al.. Fabrication of spectrally sharp Si-based dielectric resonators: combining etaloning with Mie resonances. Optics Express, 2020, 28 (25), pp.37734. ⟨10.1364/OE.409001⟩. ⟨hal-03222939⟩