In situ piezoelectric studies of PZT thin films by X-ray microdiffraction

T. Cornelius; C. Mocuta; S. Escoubas; E.C. Lima; E.B. Araujo; O. Thomas

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In situ piezoelectric studies of PZT thin films by X-ray microdiffraction

(1) , , (1) , , , (1)

1

T. Cornelius

Function : Author
PersonId : 18168
IdHAL : thcornelius
ORCID : 0000-0003-4272-4720
IdRef : 200023373

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

CV

C. Mocuta

Function : Author
PersonId : 758731
ORCID : 0000-0001-5540-449X
IdRef : 200868470

S. Escoubas

Function : Author
PersonId : 19476
IdHAL : stephanie-escoubas
ORCID : 0000-0001-9436-0055
IdRef : 220600821

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

E.C. Lima

Function : Author

E.B. Araujo

Function : Author

O. Thomas

Function : Author

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Domains

Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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Submitted on : Thursday, February 2, 2017-4:19:03 PM

Last modification on : Friday, March 24, 2023-2:53:03 PM

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hal-01453231 , version 1 (02-02-2017)

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HAL Id : hal-01453231 , version 1

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T. Cornelius, C. Mocuta, S. Escoubas, E.C. Lima, E.B. Araujo, et al.. In situ piezoelectric studies of PZT thin films by X-ray microdiffraction. 13th Biennial Conference on High Resolution X-Ray Diffraction and Imaging (XTOP2016), Sep 2016, Brno, Czech Republic. ⟨hal-01453231⟩

In situ piezoelectric studies of PZT thin films by X-ray microdiffraction

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