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Ge condensation for the fabrication of fully strained and defect-free planar Si0.5Ge0.5 layers on silicon

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https://hal-amu.archives-ouvertes.fr/hal-01454802
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Submitted on : Friday, February 3, 2017 - 9:26:58 AM
Last modification on : Wednesday, November 3, 2021 - 7:27:31 AM

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  • HAL Id : hal-01454802, version 1

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T. David, K. Liu, Luc Favre, A. Ronda, Marco Abbarchi, et al.. Ge condensation for the fabrication of fully strained and defect-free planar Si0.5Ge0.5 layers on silicon. International Conference on Nanostructures and nanomaterials self-assembly (NanoSEA), Jul 2016, Griadini Naxos, Italy. ⟨hal-01454802⟩

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