Reactive Sampling for efficient Defect Source Identification

Mohamad Chakaroun 1 Mustapha Ouladsine 1 Mohand Djeziri Jacques Pinaton 2
1 LSIS - Laboratoire des Sciences de l'Information et des Systèmes
2 ST-ROUSSET - STMicroelectronics [Rousset]
Résumé : no abstract
Document type :
Journal articles
Complete list of metadatas
https://hal-amu.archives-ouvertes.fr/hal-01479259
Contributor : William Domingues Vinhas <>
Submitted on : Tuesday, February 28, 2017 - 5:08:26 PM
Last modification on : Wednesday, September 12, 2018 - 1:26:11 AM

Identifiers

  • HAL Id : hal-01479259, version 1

Collections

LSIS-ESCODI | UNIV-AMU | LSIS | CNRS | UNIV-TLN | LIS-LAB | UNIV-HESAM

Citation

Mohamad Chakaroun, Mustapha Ouladsine, Mohand Djeziri, Jacques Pinaton. Reactive Sampling for efficient Defect Source Identification. IEEE Transactions on Semiconductor Manufacturing, Institute of Electrical and Electronics Engineers, 2016, PP, Issue:99, pp.1. ⟨hal-01479259⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

188

Contact

CCSD