Reactive Sampling for efficient Defect Source Identification
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IEEE Transactions on Semiconductor Manufacturing
Year : 2016
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https://hal-amu.archives-ouvertes.fr/hal-01479259
Submitted on : Tuesday, February 28, 2017-5:08:26 PM
Last modification on : Friday, March 24, 2023-2:53:04 PM
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- HAL Id : hal-01479259 , version 1
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Mohamad Chakaroun, Mustapha Ouladsine, Mohand Djeziri, Jacques Pinaton. Reactive Sampling for efficient Defect Source Identification. IEEE Transactions on Semiconductor Manufacturing, 2016, PP, Issue:99, pp.1. ⟨hal-01479259⟩
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