Reactive Sampling for efficient Defect Source Identification

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Submitted on : Tuesday, February 28, 2017 - 5:08:26 PM
Last modification on : Wednesday, September 12, 2018 - 1:26:11 AM

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  • HAL Id : hal-01479259, version 1

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Mohamad Chakaroun, Mustapha Ouladsine, Mohand Djeziri, Jacques Pinaton. Reactive Sampling for efficient Defect Source Identification. IEEE Transactions on Semiconductor Manufacturing, Institute of Electrical and Electronics Engineers, 2016, PP, Issue:99, pp.1. ⟨hal-01479259⟩

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