Reactive Sampling for efficient Defect Source Identification - Archive ouverte HAL Access content directly
Journal Articles IEEE Transactions on Semiconductor Manufacturing Year : 2016
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hal-01479259 , version 1 (28-02-2017)

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  • HAL Id : hal-01479259 , version 1

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Mohamad Chakaroun, Mustapha Ouladsine, Mohand Djeziri, Jacques Pinaton. Reactive Sampling for efficient Defect Source Identification. IEEE Transactions on Semiconductor Manufacturing, 2016, PP, Issue:99, pp.1. ⟨hal-01479259⟩
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