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AES measurements of Sb mass transport in amorphous Si thin films

J. Nyéki Christophe Girardeaux 1, 2 A. Rolland 2 J. Bernardini 2
1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 L2MP - Laboratoire matériaux et microélectronique de Provence
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https://hal-amu.archives-ouvertes.fr/hal-02045004
Contributor : Christophe Girardeaux <>
Submitted on : Thursday, February 21, 2019 - 5:18:02 PM
Last modification on : Monday, March 29, 2021 - 3:08:09 PM

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  • HAL Id : hal-02045004, version 1

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J. Nyéki, Christophe Girardeaux, A. Rolland, J. Bernardini. AES measurements of Sb mass transport in amorphous Si thin films. Journal de Physique IV Proceedings, EDP Sciences, 2006, 132, pp.255-258. ⟨hal-02045004⟩

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