Mechanism of β-FeSi 2 precipitates growth-and-dissolution and pyramidal defects' formation during oxidation of Fe-contaminated silicon wafers

Anthony de Luca (1) , Michael Texier (1) , Alain Portavoce (1) , Nelly Burle (1) , Catherine Grosjean , Stéphane Morata , Fabrice Michel (2)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 Service d'anesthésie et de réanimation [Hôpital de la Timone - APHM]

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Anthony de Luca, Michael Texier, Alain Portavoce, Nelly Burle, Catherine Grosjean, et al.. Mechanism of β-FeSi 2 precipitates growth-and-dissolution and pyramidal defects' formation during oxidation of Fe-contaminated silicon wafers. Journal of Applied Physics, 2015, 117 (11), pp.115302. ⟨10.1063/1.4915086⟩. ⟨hal-02385306⟩