HAL will be down for maintenance from Friday, June 10 at 4pm through Monday, June 13 at 9am. More information
Skip to Main content Skip to Navigation
Journal articles

Automated optical monitoring wavelength selection for thin-film filters

Abstract : In this paper we study the wavelength selection process for optical monitoring of thin film filters. We first discuss the technical limitations of monitoring systems as well as the criteria defining the sensitivity of different wavelengths to thickness errors. We then present an approach that considers the best monitoring wavelength for each individual layer with a monitoring strategy selection process that can be fully automated. We finally validate experimentally the proposed approach on several optical filters of increasing complexity. Optical interference filters with close to theoretical performances are demonstrated.
Document type :
Journal articles
Complete list of metadata

Contributor : Julien Lumeau Connect in order to contact the contributor
Submitted on : Thursday, October 28, 2021 - 11:14:50 AM
Last modification on : Friday, April 1, 2022 - 3:49:03 AM
Long-term archiving on: : Saturday, January 29, 2022 - 6:48:17 PM


Publisher files allowed on an open archive


Distributed under a Creative Commons Attribution 4.0 International License




Janis Zideluns, Fabien Lemarchand, Detlef Arhilger, Harro Hagedorn, Julien Lumeau. Automated optical monitoring wavelength selection for thin-film filters. Optics Express, Optical Society of America - OSA Publishing, 2021, 29 (21), pp.33398-331413. ⟨10.1364/OE.439033⟩. ⟨hal-03407010⟩



Record views


Files downloads