Virtual metrology based on relevant features extraction and Just-In-Time Learning approach
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Conference Papers
Year : 2016
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https://hal-amu.archives-ouvertes.fr/hal-01490129
Submitted on : Tuesday, March 14, 2017-10:24:20 PM
Last modification on : Friday, March 24, 2023-2:53:04 PM
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Mohamed Ali Jebri, El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology based on relevant features extraction and Just-In-Time Learning approach. Advanced Process Control at the 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2016), 2016, New-York, Unknown Region. ⟨hal-01490129⟩
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