Virtual metrology based on relevant features extraction and Just-In-Time Learning approach

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https://hal-amu.archives-ouvertes.fr/hal-01490129
Contributor : William Domingues Vinhas <>
Submitted on : Tuesday, March 14, 2017 - 10:24:20 PM
Last modification on : Wednesday, September 12, 2018 - 1:27:24 AM

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  • HAL Id : hal-01490129, version 1

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Mohamed Jebri, El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology based on relevant features extraction and Just-In-Time Learning approach. Advanced Process Control at the 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2016), 2016, New-York, Unknown Region. ⟨hal-01490129⟩

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